Optimizing precision of rotating compensator ellipsometry

Systematic and random errors in rotating-analyzer, ellipsometry

Errors and error sources occurring in rotating-analyzer ellipsometry are discussed. From general considerations it is shown that a rotating-analyzer ellipsometer is inaccurate if applied at P = 00 and in cases when 0 = 0' or where A is near 00 or 1800. Window errors, component imperfections, azimuth errors and all other errors may, to first order, be treated independently and can subsequently b...

Optimizing Precision Overhead for x86 Processors

It is a major challenge for a Java JIT compiler to perform single-precision floating-point operations efficiently for the x86 processors. In previous research, the doubleprecision mode is set as the default precision mode when methods are invoked. This introduces redundant mode switches to preserve the default precision mode across method boundaries. Furthermore, the precision mode is switched ...

Optimizing Precision for Open-World Website Fingerprinting

Traffic analysis attacks to identify which web page a client is browsing, using only her packet metadata — known as website fingerprinting — has been proven effective in closed-world experiments against privacy technologies like Tor. However, due to the base rate fallacy, these attacks have failed in large open-world settings against clients that visit sensitive pages with a low base rate. We f...

Assessment of Ultra-Thin SiO2 Film Thickness Measurement Precision by Ellipsometry

The ellipsometric film thickness measurement precision for equivalent oxide thickness as prescribed by the International Technology Roadmap for Semiconductors is quite high. Although short-term precision on a single ellipsometric instrument can be quite high, deviations of measured film thickness from instrument-to-instrument and from lab-to-lab for short-term and long-term periods of time need...

Rotating or Rotatable Compensator Spectroscopic Ellipsometer System Including Multiple Element Lenses